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Investigation of composition and origin of the intermediate layers at the Ga2O3/AlN and Ga2O3/Al2O3 interfaces

Marco Schowalter, S. Raghuvansy, A. Karg, P. Vogt, D. Schlom, D. Jena, M. Eickhoff and A. Rosenauer

BIO Web Conf., 129 (2024) 24042

DOI: https://doi.org/10.1051/bioconf/202412924042

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