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Cited article:

Applications of electron channeling pattern for the determination of wafer offcut and misorientation angles

Han Han, Libor Strakoš, Clément Porret, Valérie Depauw, Tomáš Vystavěl, Olivier Richard, Marina Baryshnikova, Eva Grieten and Thomas Hantschel
Micron 199 103912 (2025)
https://doi.org/10.1016/j.micron.2025.103912