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Electron channeling pattern imaging – a novel approach for the determination of wafer offcut angles

Han Han, Libor Strakos, Clément Porret, Valérie Depauw, Tomas Vystavel, Olivier Richard, Eva Grieten and Thomas Hantschel

BIO Web Conf., 129 (2024) 07022

DOI: https://doi.org/10.1051/bioconf/202412907022

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