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In-situ electrical characterization of MOSFET transistors using AFM-in-SEM solution

Ondrej Novotny, Libor Strakos, Marek Patocka, Vojtech Schanilec, Veronika Hegrova, Umberto Celano, Tomas Vystavel and Jan Neuman

BIO Web Conf., 129 (2024) 24023

DOI: https://doi.org/10.1051/bioconf/202412924023

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