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Strain analysis comparison in complementary and nanosheet field-effect transistor devices: Nanobeam vs Bessel electron diffraction

Paola Favia, Anabela Veloso, Geert Eneman, Ankit Nalin Mehta, Xiuju Zhou, Olivier Richard, Jef Geypen and Eva Grieten

BIO Web Conf., 129 (2024) 24025

DOI: https://doi.org/10.1051/bioconf/202412924025

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