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Strain mapping and simulation of transistor structures in a 22nm FDSOI technology

Dirk Utess, Dominik Martin Kleimaier, Etienne Billan, Tashfain Youssuf, Zhixing Zhao, Thorgund Nemec, Moritz Andreas Meyer and Jochen Rinderknecht

BIO Web Conf., 129 (2024) 24030

DOI: https://doi.org/10.1051/bioconf/202412924030

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