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Structural and Electrical Characterization of Hf_0.5Zr_0.5O₂ Thin Films Crystallized by Rapid Thermal Annealing

Jucheol Park, Yeong Gyeong Park, Min-Ho Kang, Myung-Keun Lee and Moon Seop Hyun

BIO Web Conf., 129 (2024) 24040

DOI: https://doi.org/10.1051/bioconf/202412924040

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