Fabrication and high-resolution transmission electron microscopy characterization of nanopores in silicon nitride and 2D materialsTeresa Tang, Marco Kögel, Michael Mierzejewski, Michael Schlegel, Peter D. Jones and Jannik C. MeyerBIO Web Conf., 129 (2024) 22043DOI: https://doi.org/10.1051/bioconf/202412922043