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Electron channeling pattern imaging – a novel approach for the determination of wafer offcut angles

Han Han, Libor Strakos, Clément Porret, Valérie Depauw, Tomas Vystavel, Olivier Richard, Eva Grieten and Thomas Hantschel

BIO Web Conf., 129 (2024) 07022

Published online: 17 October 2024

DOI: 10.1051/bioconf/202412907022

Han Han

Libor Strakos

Clément Porret

Valérie Depauw

Tomas Vystavel

Olivier Richard

Eva Grieten

Thomas Hantschel

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Articles written by ANY OF the selected authors (OR)

eISSN: 2117-4458