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Imaging MEMS motion at nano scale by time-resolved scanning electron microscopy

Mohamed Zaghloul, Abbas Kosari Mehr, Riccardo Bertacco, Simone Cuccurullo, Federico Maspero, Giulia Pavese, Hao Chen, Aldo Ghisi, Alberto Corigliano, Silvia M. Pietralunga and Alberto Tagliaferri

BIO Web Conf., 129 (2024) 09006

Published online: 17 October 2024

DOI: 10.1051/bioconf/202412909006

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