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In-situ electrical characterization of MOSFET transistors using AFM-in-SEM solution

Ondrej Novotny, Libor Strakos, Marek Patocka, Vojtech Schanilec, Veronika Hegrova, Umberto Celano, Tomas Vystavel and Jan Neuman

BIO Web Conf., 129 (2024) 24023

Published online: 17 October 2024

DOI: 10.1051/bioconf/202412924023

Ondrej Novotny

Libor Strakos

Marek Patocka

Vojtech Schanilec

Veronika Hegrova

Umberto Celano

Tomas Vystavel

Jan Neuman

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)

eISSN: 2117-4458