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Strain analysis comparison in complementary and nanosheet field-effect transistor devices: Nanobeam vs Bessel electron diffraction

Paola Favia, Anabela Veloso, Geert Eneman, Ankit Nalin Mehta, Xiuju Zhou, Olivier Richard, Jef Geypen and Eva Grieten

BIO Web Conf., 129 (2024) 24025

Published online: 17 October 2024

DOI: 10.1051/bioconf/202412924025

Paola Favia

Anabela Veloso

Geert Eneman

Ankit Nalin Mehta

Xiuju Zhou

Olivier Richard

Jef Geypen

Eva Grieten

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Articles written by ANY OF the selected authors (OR)

eISSN: 2117-4458