BIO Web of Conferences

Structural and Electrical Characterization of Hf_0.5Zr_0.5O₂ Thin Films Crystallized by Rapid Thermal Annealing

Jucheol Park, Yeong Gyeong Park, Min-Ho Kang, Myung-Keun Lee and Moon Seop Hyun

BIO Web Conf., 129 (2024) 24040

Published online: 17 October 2024

DOI: 10.1051/bioconf/202412924040

Jucheol Park

Yeong Gyeong Park

Min-Ho Kang

Myung-Keun Lee

Moon Seop Hyun

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