5D-ToF-STIM Hyperspectral Imaging with a keV He+ Focused Ion Beam Dustin Andersen, Michael Mousley, Saba Tabean, Radek Holeňák, Eleni Ntemou, Gerhard Hobler, Tom Wirtz, Daniel Primetzhofer and Santhana Eswara BIO Web Conf., 129 (2024) 06006 Published online: 17 October 2024 DOI: 10.1051/bioconf/202412906006