| Issue |
BIO Web Conf.
Volume 129, 2024
The 17th European Microscopy Congress (EMC 2024)
|
|
|---|---|---|
| Article Number | 24020 | |
| Number of page(s) | 2 | |
| Section | Semiconductors, Heterostructures, and Devices | |
| DOI | https://doi.org/10.1051/bioconf/202412924020 | |
| Published online | 17 October 2024 | |
Effect of Oxygen-Doping in Ferroelectric Wurtzite-type Al0.73Sc0.27N
1 Synthesis and Real structure, Department of Material Science (Kiel University), Kiel, Germany,
2 Nanoelectronics, Institute of Electrical and Information Engineering (Kiel University), Kiel, Germany,
3 Microsystem and technology transfer, Department of Material Science (Kiel University), Kiel, Germany,
4 Fraunhofer Institute for Silicon Technology, Itzehoe, Germany
This article has no abstract.
Key words: Wurtzite-type / Ferroelectric / doping / Oxygen
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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