Effect of Oxygen-Doping in Ferroelectric Wurtzite-type Al0.73Sc0.27N Redwanul Islam, Niklas Wolff, Georg Schoenweger, Simon Fichtner and Lorenz Kienle BIO Web Conf., 129 (2024) 24020 Published online: 17 October 2024 DOI: 10.1051/bioconf/202412924020